Design and fabrication of a microelectromechanical (MEM) switch-based microwave high Tc superconductor resonator Thesis

thesis or dissertation chair

fiu authors

  • Fairweather, Dane


  • This work extends the use of our high performance (less than 0.05 dB insertion loss, greater than 30 dB isolation) high-Tc superconductor MEM switch to a switched-based coplanar waveguide "T"-resonator structure. The most significant advantages here are its low mass and volume. Competitive technologies require actuators on the order of a few milligrams to a few tens of grams or more and volumes of the order of tens of cm3. The integrated MEM devices present the designer with an alternative of a mass of a few micrograms and a volume of less than 5x 10-6 cm3 at the same performance levels. The design of the switch was optimized using Sonnet simulations.

publication date

  • November 22, 2004

Digital Object Identifier (DOI)