Elastic modulus study of gold thin film for use as an actuated membrane in a superconducting RF MEM switch Article Proceedings Paper

cited authors

  • Bogozi, A; Datye, AV; Brzhezinskaya, M; Hijazi, YS; Martinez, J; Noel, J; Wu, KH; Vlasov, YA; Larkins, GL

publication date

  • 2005

Digital Object Identifier (DOI)

start page

  • 980

end page

  • 983

volume

  • 15

issue

  • 2

research area