Partially ionized beam deposition of parylene Article

Khabari, A, Urban, FK. (2004). Partially ionized beam deposition of parylene . JOURNAL OF NON-CRYSTALLINE SOLIDS, 351(43-45), 3536-3541. 10.1016/j.jnoncrysol.2005.08.027



cited authors

  • Khabari, A; Urban, FK

fiu authors

publication date

  • 2004

webpage

published in

Digital Object Identifier (DOI)

start page

  • 3536

end page

  • 3541

volume

  • 351

issue

  • 43-45

research area