Numerical Ellipsometry: Ellipsometer analysis in the n-k plane for growing films on unknown homogeneous, isotropic substrates and unknown, layered substrates Article

cited authors

  • Urban, F. K., III; Barton, D.

publication date

  • 2008

published in

Digital Object Identifier (DOI)

start page

  • 1081

end page

  • 1085

volume

  • 517

issue

  • 3

research area