Numerical ellipsometry: Analysis of thin metal layers using n-k plane methods with multiple incidence angles Article Proceedings Paper

cited authors

  • Urban, F. K., III; Barton, D.; Tiwald, T.

publication date

  • 2009

published in

Digital Object Identifier (DOI)

start page

  • 1411

end page

  • 1414

volume

  • 518

issue

  • 5

research area