Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles Article Proceedings Paper

cited authors

  • Urban, F. K., III; Barton, D.; Tiwald, T.

publication date

  • 2010

Digital Object Identifier (DOI)

start page

  • 947

end page

  • 952

volume

  • 28

issue

  • 4

research area