Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles Article Proceedings Paper

Urban, F. K., III, Barton, D., Tiwald, T.. (2010). Numerical ellipsometry: Analysis of thin metal layers using n-k-d twisted curve methods with multiple incidence angles . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 28(4), 947-952. 10.1116/1.3439679



cited authors

  • Urban, F. K., III; Barton, D.; Tiwald, T.

fiu authors

publication date

  • 2010

Digital Object Identifier (DOI)

start page

  • 947

end page

  • 952

volume

  • 28

issue

  • 4

research area