Sub-10-nm-resolution electron-beam lithography toward very-high-density multilevel 3D nano-magnetic information devices Article

Lee, Beomseop, Hong, Jeongmin, Amos, Nissim et al. (2013). Sub-10-nm-resolution electron-beam lithography toward very-high-density multilevel 3D nano-magnetic information devices . JOURNAL OF NANOPARTICLE RESEARCH, 15(6), 10.1007/s11051-013-1665-7



cited authors

  • Lee, Beomseop; Hong, Jeongmin; Amos, Nissim; Dumer, Ilya; Litvinov, Dmitri; Khizroev, Sakhrat

fiu authors

publication date

  • 2013

published in

Digital Object Identifier (DOI)

volume

  • 15

issue

  • 6

research area