SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications Article

Gaitas, Angelo, Hower, Robert W.. (2014). SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications . JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 13(3), 10.1117/1.JMM.13.3.030501



cited authors

  • Gaitas, Angelo; Hower, Robert W.

publication date

  • 2014

Digital Object Identifier (DOI)

volume

  • 13

issue

  • 3

research area