Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition Article

Sampath, Sridhar, Maydannik, Philipp, Ivanova, Tatiana et al. (2016). Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition . THIN SOLID FILMS, 616 628-634. 10.1016/j.tsf.2016.09.026



International Collaboration

cited authors

  • Sampath, Sridhar; Maydannik, Philipp; Ivanova, Tatiana; Homola, Tomas; Sillanpaa, Mika; Nagumothu, Rameshbabu; Alagan, Viswanathan

publication date

  • 2016

webpage

published in

Digital Object Identifier (DOI)

start page

  • 628

end page

  • 634

volume

  • 616

research area