Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition Article
Sampath, Sridhar, Maydannik, Philipp, Ivanova, Tatiana et al. (2016). Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition
. THIN SOLID FILMS, 616 628-634. 10.1016/j.tsf.2016.09.026
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