Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition Article

International Collaboration

cited authors

  • Sampath, Sridhar; Maydannik, Philipp; Ivanova, Tatiana; Homola, Tomas; Sillanpaa, Mika; Nagumothu, Rameshbabu; Alagan, Viswanathan

publication date

  • 2016

published in

Digital Object Identifier (DOI)

start page

  • 628

end page

  • 634

volume

  • 616

research area