Nanophase films deposited from a high-rate, nanoparticle beam Article

Urban, FK, Hosseini-Tehrani, A, Griffiths, P et al. (2002). Nanophase films deposited from a high-rate, nanoparticle beam . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 20(3), 10.1116/1.1481749



cited authors

  • Urban, FK; Hosseini-Tehrani, A; Griffiths, P; Khabari, A; Kim, YW; Petrov, I

publication date

  • 2002

Digital Object Identifier (DOI)

volume

  • 20

issue

  • 3

research area