An electrical defectivity characterization of wafers imprinted with step and flash imprint lithography Proceedings Paper

Industry Collaboration

cited authors

  • Dauksher, W. J.; Le, N. V.; Gehoski, K. A.; Ainley, E. S.; Nordquist, K. J.; Joshi, N.; Lercel, MJ

publication date

  • 2007

author keyword


Digital Object Identifier (DOI)


  • 6517

research area