Characterization of Line Nanopatterns on Positive Photoresist Produced by Scanning Near-Field Optical Microscope Article

Open Access International Collaboration

cited authors

  • Aghaei, Sadegh Mehdi; Yasrebi, Navid; Rashidian, Bizhan

publication date

  • 2015

published in

category

Digital Object Identifier (DOI)

research area