HIGH-THROUGHPUT PULSED LASER MANUFACTURING ETCH PROCESS FOR COMPLEX AND RELEASED STRUCTURES FROM BULK 4H-SIC Proceedings Paper

cited authors

  • Ransom, Elliot H.; Dowling, Karen M.; Rocca-Bejar, Daniela; Palko, James W.; Senesky, Debbie G.; IEEE

publication date

  • 2017

category

research area