STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE Article Proceedings Paper

URBAN, FK, BERNSTEIN, A. (1991). STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 9(3), 10.1116/1.577404



cited authors

  • URBAN, FK; BERNSTEIN, A

fiu authors

publication date

  • 1991

Digital Object Identifier (DOI)

volume

  • 9

issue

  • 3