EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION Article Proceedings Paper

URBAN, FK, FENG, SW. (1992). EFFECTS OF SPACE-CHARGE ON ION ENERGY IN IONIZED CLUSTER BEAM FILM DEPOSITION . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 10(4), 10.1116/1.578271



cited authors

  • URBAN, FK; FENG, SW

fiu authors

publication date

  • 1992

category

Digital Object Identifier (DOI)

volume

  • 10

issue

  • 4

research area