SELECTIVE-AREA DEPOSITION OF METAL-FILMS BY THE IONIZED CLUSTER BEAM METHOD Article

URBAN, FK, HOSSEINITEHRANI, A, FENG, SW et al. (1993). SELECTIVE-AREA DEPOSITION OF METAL-FILMS BY THE IONIZED CLUSTER BEAM METHOD . APPLIED PHYSICS LETTERS, 62(24), 10.1063/1.109155



cited authors

  • URBAN, FK; HOSSEINITEHRANI, A; FENG, SW; NAINAPARAMPIL, JJ

publication date

  • June 1993

published in

category

Digital Object Identifier (DOI)

volume

  • 62

issue

  • 24

research area

  • Physics  Web of Science Research Area