VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES

VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES Article Proceedings Paper

cited authors

URBAN, FK; TABET, MF

fiu authors

Urban, Frank

publication date

1993

webpage

Web of Science™

published in

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A Journal

category

MATERIALS SCIENCE, COATINGS & FILMS Web of Science Category
PHYSICS, APPLIED Web of Science Category

Digital Object Identifier (DOI)

https://doi.org/10.1116/1.578578

volume

11

issue

4

research area

Materials Science Web of Science Research Area
Physics Web of Science Research Area