VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES Article Proceedings Paper

URBAN, FK, TABET, MF. (1993). VIRTUAL INTERFACE METHOD FOR IN-SITU ELLIPSOMETRY OF FILMS GROWN ON UNKNOWN SUBSTRATES . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 11(4), 10.1116/1.578578



cited authors

  • URBAN, FK; TABET, MF

fiu authors

publication date

  • 1993

category

Digital Object Identifier (DOI)

volume

  • 11

issue

  • 4

research area