STUDY OF ZINC THIN-FILMS FORMED USING LARGE CLUSTERS IN THE IONIZED CLUSTER BEAM DEPOSITION TECHNIQUE

STUDY OF ZINC THIN-FILMS FORMED USING LARGE CLUSTERS IN THE IONIZED CLUSTER BEAM DEPOSITION TECHNIQUE Article Proceedings Paper

cited authors

URBAN, FK; FENG, SW; NAINAPARAMPIL, JJ

fiu authors

Urban, Frank

publication date

1993

webpage

Web of Science™

published in

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Journal

category

ENGINEERING, ELECTRICAL & ELECTRONIC Web of Science Category
NANOSCIENCE & NANOTECHNOLOGY Web of Science Category
PHYSICS, APPLIED Web of Science Category

Digital Object Identifier (DOI)

https://doi.org/10.1116/1.586522

volume

11

issue

5

research area

Engineering Web of Science Research Area
Physics Web of Science Research Area
Science & Technology - Other Topics Web of Science Research Area