NUMERICAL ELLIPSOMETRY - ENHANCEMENT OF NEW ALGORITHMS FOR REAL-TIME, IN-SITU FILM GROWTH MONITORING Article

URBAN, FK, COMFORT, JC. (1994). NUMERICAL ELLIPSOMETRY - ENHANCEMENT OF NEW ALGORITHMS FOR REAL-TIME, IN-SITU FILM GROWTH MONITORING . THIN SOLID FILMS, 253(1-2), 10.1016/0040-6090(94)90332-8



cited authors

  • URBAN, FK; COMFORT, JC

fiu authors

publication date

  • December 1994

published in

author keyword

Digital Object Identifier (DOI)

volume

  • 253

issue

  • 1-2

research area