MODELING OF SURFACE-ROUGHNESS IN VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY, USING NUMERICAL PROCESSING OF ATOMIC-FORCE MICROSCOPY IMAGES Article

cited authors

  • URBAN, FK; ATHEY, PR; ISLAM, MS

fiu authors

publication date

  • December 1994

published in

author keyword

category

Digital Object Identifier (DOI)

volume

  • 253

issue

  • 1-2

research area