Recent developments in ionized cluster beam thin film deposition Article Proceedings Paper

Cox, AJ, Nainaparampil, JJ, Tabet, MF et al. (1995). Recent developments in ionized cluster beam thin film deposition . THIN SOLID FILMS, 270(1-2), 10.1016/0040-6090(95)06845-7



cited authors

  • Cox, AJ; Nainaparampil, JJ; Tabet, MF; HosseiniTehrani, A; Urban, FK

publication date

  • December 1995

published in

author keyword

Digital Object Identifier (DOI)

volume

  • 270

issue

  • 1-2

research area