Recent developments in ionized cluster beam thin film deposition

Recent developments in ionized cluster beam thin film deposition Article Proceedings Paper

cited authors

Cox, AJ; Nainaparampil, JJ; Tabet, MF; HosseiniTehrani, A; Urban, FK

fiu authors

Urban, Frank

publication date

December 1995

webpage

Web of Science™

published in

THIN SOLID FILMS Journal

author keyword

CLUSTERS Author Keyword
ZINC Author Keyword
deposition process Author Keyword

category

MATERIALS SCIENCE, COATINGS & FILMS Web of Science Category
MATERIALS SCIENCE, MULTIDISCIPLINARY Web of Science Category
PHYSICS, APPLIED Web of Science Category
PHYSICS, CONDENSED MATTER Web of Science Category

Digital Object Identifier (DOI)

https://doi.org/10.1016/0040-6090(95)06845-7

volume

270

issue

1-2

research area

Materials Science Web of Science Research Area
Physics Web of Science Research Area