Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring Article

Urban, FK, Comfort, JC. (1996). Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 14(4), 10.1116/1.580018



cited authors

  • Urban, FK; Comfort, JC

fiu authors

publication date

  • 1996

category

Digital Object Identifier (DOI)

volume

  • 14

issue

  • 4

research area