A method for measuring the elastic modulus of thin films Article

Shi, JD, Wu, KH, Larkins, G. (1997). A method for measuring the elastic modulus of thin films . MATERIALS CHARACTERIZATION, 38(4-5), 10.1016/S1044-5803(97)00084-3



cited authors

  • Shi, JD; Wu, KH; Larkins, G

publication date

  • 1997

published in

Digital Object Identifier (DOI)

volume

  • 38

issue

  • 4-5

research area