Local chemical vapor deposition of carbon nanofibers from photoresist Article

keywords

  • Chemistry
  • Chemistry, Physical
  • MEMS
  • Materials Science
  • Materials Science, Multidisciplinary
  • NANOTUBES
  • POLYMER
  • Physical Sciences
  • STORAGE
  • Science & Technology
  • Technology
  • carbon nanofibers
  • chemical vapor deposition
  • electron microscopy
  • microstructure
  • pyrolysis

Digital Object Identifier (DOI)

start page

  • 3073

end page

  • 3077

volume

  • 44

issue

  • 14