From MEMS to NEMS with carbon Conference

keywords

  • Biophysics
  • Biotechnology & Applied Microbiology
  • C-MEMS
  • Chemistry
  • Chemistry, Analytical
  • Electrochemistry
  • FABRICATION
  • FILMS
  • GLASSY-CARBON
  • Life Sciences & Biomedicine
  • Nanoscience & Nanotechnology
  • PYROLYZED PHOTORESIST
  • Physical Sciences
  • REDUCTION
  • Science & Technology
  • Science & Technology - Other Topics
  • carbon-microclectromechanical system (C-MEMS)
  • high-aspect ratio
  • photoresist
  • pyrolysis
  • suspended structure

Location

  • Granada, SPAIN

Digital Object Identifier (DOI)

Conference

  • 8th World Congress on Biosensors

start page

  • 2181

end page

  • 2187

volume

  • 20

issue

  • 10