Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media Article

keywords

  • BENZENE
  • C-MEMS
  • CHEMICAL-VAPOR-DEPOSITION
  • CHEMISTRY
  • ELECTROCHEMICAL APPLICATIONS
  • Electrochemistry
  • FABRICATION
  • KINETICS
  • LOW-TEMPERATURE REGIME
  • Materials Science
  • Materials Science, Coatings & Films
  • PYROCARBON DEPOSITION
  • PYROLYTIC CARBON
  • Physical Sciences
  • Science & Technology
  • Technology

Digital Object Identifier (DOI)

start page

  • J136

end page

  • J143

volume

  • 152

issue

  • 12