Carbon-MEMS architectures for 3D microbatteries Conference

keywords

  • C-MEMS
  • ION RECHARGEABLE BATTERIES
  • Li intercalation
  • Materials Science
  • Materials Science, Multidisciplinary
  • Optics
  • PHOTORESIST
  • Physical Sciences
  • Science & Technology
  • Technology
  • microbattery
  • photoresist
  • pyrolysis
  • simulation

Location

  • Strasbourg, FRANCE

Digital Object Identifier (DOI)

Conference

  • Conference on MEMS, MOEMS and Micromachining

start page

  • 295

end page

  • 302

volume

  • 5455