Growth of high-quality homoepitaxial CVD diamond films at high growth rate Article

Teraji, T, Mitani, S, Wang, CL et al. (2002). Growth of high-quality homoepitaxial CVD diamond films at high growth rate . 235(1-4), 287-292. 10.1016/S0022-0248(01)01802-4

keywords

  • Crystallography
  • DEPOSITION
  • Materials Science
  • Materials Science, Multidisciplinary
  • PLASMA
  • Physical Sciences
  • Physics
  • Physics, Applied
  • Science & Technology
  • THIN-FILMS
  • Technology
  • characterization
  • chemical vapor deposition processes
  • crystal morphology
  • diamond
  • homoepitaxial growth
  • semiconducting materials

Digital Object Identifier (DOI)

start page

  • 287

end page

  • 292

volume

  • 235

issue

  • 1-4