High-rate deposition of high-quality homoepitaxial diamond films Article

Teraji, T, Mitani, S, Wang, CL et al. (2002). High-rate deposition of high-quality homoepitaxial diamond films . 12(6), 355-368.

keywords

  • CHEMICAL-VAPOR-DEPOSITION
  • GROWTH
  • Materials Science
  • Materials Science, Coatings & Films
  • Materials Science, Multidisciplinary
  • Science & Technology
  • THIN-FILMS
  • Technology
  • buffer layer
  • carrier diffusion
  • cathodoluminescence
  • free exciton
  • high growth rate
  • high quality

start page

  • 355

end page

  • 368

volume

  • 12

issue

  • 6